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Journal of Vacuum Science & Technology B

Journal Abbreviation: J VAC SCI TECHNOL B
Journal ISSN: 1071-1023

About Journal of Vacuum Science & Technology B

    The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures. The emphasis will be on processing, measurement and phenomena, and will include vacuum processing, plasma processing, materials and structural characterization, microlithography, and the physics and chemistry of submicron and nanometer structures and devices. The journal also publishes papers from conferences and symposia that are sponsored by the AVS and its divisions.
Year Impact Factor (IF) Total Articles Total Cites
2024 (2025 update) 1.2 - 6714
2023 1.5 - -
2022 1.4 - 7113
2021 1.572 - 8227
2020 1.416 206 8106
2019 1.511 137 7740
2018 1.351 231 8092
2017 1.314 245 8710
2016 1.573 293 9371
2015 1.398 281 9320
2014 1.464 284 9961
2013 1.358 326 10304
2012 1.267 331 9885
2011 1.341 442 10637

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