Journal Of Vacuum Science & Technology B Impact Factor

Journal Abbreviation: J VAC SCI TECHNOL B
Journal ISSN: 1071-1023

Year Impact Factor (IF) Total Articles Total Cites
2013/2014 1.358 326 10304
2012 1.267 331 9885
2011 1.341 442 10637
2010 1.268 526 10442
2009 1.46 619 10072
2008 1.445 465 11006

About Journal Of Vacuum Science & Technology B

    The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures. The emphasis will be on processing, measurement and phenomena, and will include vacuum processing, plasma processing, materials and structural characterization, microlithography, and the physics and chemistry of submicron and nanometer structures and devices. The journal also publishes papers from conferences and symposia that are sponsored by the AVS and its divisions.