Journal Abbreviation: J MICRO-NANOLITH MEM
Journal ISSN: 1932-5150
| Year | Impact Factor (IF) | Total Articles | Total Cites |
| 2022 (2023 update) | 2.0 | - | 911 |
| 2021 | 1.167 | - | 851 |
| 2020 | 1.220 | 26 | 872 |
| 2019 | 1.559 | 52 | 929 |
| 2018 | 1.193 | 68 | 954 |
| 2017 | 1.299 | 77 | 972 |
| 2016 | 1.350 | 95 | 906 |
| 2015 | 1.335 | 105 | 759 |
| 2014 | 1.428 | 120 | 692 |
| 2013 | 1.205 | 101 | 579 |
| 2012 | 1.148 | 96 | 449 |
| 2011 | 0.995 | 85 | 393 |
| 2010 | 1.194 | 91 | 334 |