Journal Abbreviation: MICROELECTRON ENG
Journal ISSN: 0167-9317
| Year | Impact Factor (IF) | Total Articles | Total Cites |
| 2024 (2025 update) | 3.1 | - | 8106 |
| 2023 | 2.6 | - | - |
| 2022 | 2.3 | - | 8065 |
| 2021 | 2.662 | - | 8932 |
| 2020 | 2.523 | 165 | 8616 |
| 2019 | 2.305 | 234 | 8240 |
| 2018 | 1.654 | 225 | 7987 |
| 2017 | 2.020 | 284 | 8183 |
| 2016 | 1.806 | 334 | 8009 |
| 2015 | 1.277 | 423 | 7249 |
| 2014 | 1.197 | 410 | 7537 |
| 2013 | 1.338 | 557 | 7371 |
| 2012 | 1.224 | 486 | 6638 |
| 2011 | 1.557 | 762 | 6746 |