Journal Abbreviation: MICROSYST TECHNOL
Journal ISSN: 0946-7076
| Year | Impact Factor (IF) | Total Articles | Total Cites |
| 2024 (2025 update) | 1.8 | - | 5927 |
| 2023 | - | - | |
| 2022 | 2.1 | - | 6596 |
| 2021 | 2.012 | - | 6467 |
| 2020 | 2.276 | 570 | 6181 |
| 2019 | 1.737 | 442 | 4687 |
| 2018 | 1.513 | 490 | 3976 |
| 2017 | 1.581 | 562 | 3675 |
| 2016 | 1.195 | 317 | 2664 |
| 2015 | 0.974 | 316 | 2135 |
| 2014 | 0.875 | 264 | 2075 |
| 2013 | 0.952 | 240 | 2026 |
| 2012 | 0.827 | 232 | 1777 |
| 2011 | 0.931 | 209 | 1738 |