Journal Abbreviation: MICROLITHOGR WORLD
Journal ISSN: 1074-407X
| Year | Impact Factor (IF) | Total Articles | Total Cites |
| 2022 (2023 update) | - | - | |
| 2021 | - | - | |
| 2020 | - | - | |
| 2019 | - | - | |
| 2018 | - | - | |
| 2017 | - | - | |
| 2016 | - | - | |
| 2015 | - | - | |
| 2014 | - | - | |
| 2013 | - | - | |
| 2012 | - | - | |
| 2011 | - | - | |
| 2010 | 0.375 | 0 | 25 |