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Materials Science in Semiconductor Processing

Journal Abbreviation: MAT SCI SEMICON PROC
Journal ISSN: 1369-8001

About Materials Science in Semiconductor Processing

    Materials Science in Semiconductor Processing provides a unique and much needed forum for the discussion of experimental and theoretical materials research stimulated by and applied to semiconductor processing. <br/><br/>Each issue will aim to provide a snapshot of current comprehension, new achievements, breakthroughs and future trends in such fields as ion implantation, diffusion and gettering, process and equipment modelling, metallization and interconnects, packaging, etc, which are the backbone of semiconductor device processing.
Year Impact Factor (IF) Total Articles Total Cites
2024 (2025 update) 4.6 - 21632
2023 4.2 - -
2022 4.1 - 15385
2021 4.644 - 14529
2020 3.927 485 11415
2019 3.085 468 8933
2018 2.722 412 7465
2017 2.593 455 6002
2016 2.359 390 4978
2015 2.264 753 3325
2014 1.955 518 1916
2013 1.761 311 1166
2012 1.338 108 896
2011 0.753 55 742

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